FEI Dualbeam Field-Emission SEM with Focused Ion Beam

Field Emission Scanning Electron Microscope Focussed Ion Beam SEM/FIB at SFU


Our newest scanning electron microscope is an FEI DualBeam Strata 235 that includes both an SEM and a Focused Ion Beam together with an EDAX X-ray analyzer. This instrument will allow regular SEM imaging and x-ray analysis plus the capability to ion mill the sample with the FIB. The sample can be cross-sectioned for SEM or STEM imaging or patterned into nanostructures for other applications.

Features: X-ray analyzer (EDAX) Analysis 
EDAX Xray anaylisis component EDAX screen shot EDAX screen shot

  • Full Spectrum Mapping & Data Recovery

  • automated quantitative elemental analysis

  • live spectral collection, spectral manipulation, Peak ID, background removal, and intensity and concentration calculations. A single click of the mouse can perform all desired calculations.

Focused Ion Beam(FIB)
General Information about FIBs
Applications of FIBs

Closeup of Ion and electron cannons Pattern milled with Ion Beam

  • Magnum™ ion column. (18 mm working distance)


  • Gas chemistry not only allows you to mill the sample selectively, but also to reveal oxide layers where conventional SEM imaging provides no contrast.


  • Various Apertures (1pA, 10PA, 30pA, 50pA, 100pA, 300pA, 500pA, 1000pA, 3000pA, 5000pA, 7000pA, 20000pA ) allow for varied precision of the Ion Mill, and milling into various materials.


  • Specialized software allows for TEM sample preparation


  • Custom pattern milling designs can be milled simultaneously or serial.

 

Scanning Electron Microscope (SEM)
General Information about SEMs

Inside of column chamber

  • Hexalens™ electron column (5 mm working distance)

  • Seaching Magnification up to 500,000 X
    Ultra High Resolution Made over 2,500,000 X

  • Ultrahigh resolution SEM imaging.

Optical Microscope

Optical Microscope used for position
Low Magnification optical microscope for tip positioning

Interface Computer

Computer in SEM/FIB room
  • Windows NT Interface
  • Pentium 3 EDAX controller
  • CR-ROM
  • CR Rewriter
  • floppy disk drive
  • HP Color Printer

  • Codonics NP-1660 network photo paper printer